JVB 22_1234.pdf (281.3 kB)
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Copyright(2004) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science aechnology B, 22(3),pp.1234-1239 ; 2004 and may be found at http://link.aip.org/link/?jvb/22/1234. |
JVB 22_1234.pdf
9130ff7d-a87e-419c-bbcf-d0c8541b451d
https://nitech.repo.nii.ac.jp/record/5197/files/JVB 22_1234.pdf